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An AlGaN/GaN lateral field-effect rectifier with intrinsic ON-state current limiting capability is demonstrated by adding a Schottky contact metal (length of LD) beyond the ohmic contact region at the cathode electrode. The onset of the current limiting function is self-activated when the voltage drop across the two-dimensional gas (2DEG) channel under the Schottky contact reaches the pinch-off voltage of the as-grown AlGaN/GaN heterojunction. With LD=2 µm and a drift region length of 7 µm, the proposed lateral rectifier exhibited an ON-state current that was self-limited at 1.56 kA/cm2, while achieving a reverse breakdown voltage of 347 V at a 1mA/mm leakage current.
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