Modifying functionality of variable optical attenuator to signal monitoring through defect engineering

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Modifying functionality of variable optical attenuator to signal monitoring through defect engineering

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Published

A commercial silicon-based variable optical attenuator has been converted to a low bandwidth (quasi-CW) light monitor through an ion implantation and annealing process. The measured total optical loss of the device is <5 dB while the responsivity per tapped fraction is 1 mA/W/dB. The straightforward manner in which the monitoring functionality is induced suggests a cost-effective route to CW optical monitors using a widely available commercial product.

Inspec keywords: optical attenuators; annealing; optical waveguide components; ion implantation; silicon; integrated optics

Other keywords: ion implantation; annealing process; continuous wave optical monitor; defect engineering; low bandwidth light monitor; SiJk; variable optical attenuator; signal monitoring

Subjects: Integrated optics; Semiconductor doping; Annealing processes in semiconductor technology; Other heat and thermomechanical treatments; Optical waveguides and couplers; Annealing processes; Integrated optics; Optical waveguides; Doping and implantation of impurities

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