Nerve gas sensor using film bulk acoustic resonator coated with poly (vinylidene fluoride)

Access Full Text

Nerve gas sensor using film bulk acoustic resonator coated with poly (vinylidene fluoride)

For access to this article, please select a purchase option:

Buy article PDF
£12.50
(plus tax if applicable)
Add to cart
Buy Knowledge Pack
10 articles for £75.00
(plus taxes if applicable)
Add to cart

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Electronics Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

© The Institution of Engineering and Technology
Published

A nerve gas sensor based on a film bulk acoustic resonator is presented. The resonator consists of a piezoelectric Au/AlN/Mo stack and a Bragg reflector and has a working resonance near 2.1 GHz. A poly (vinylidene fluoride) layer is coated on the top electrode as a specific chemical recognition. The sensor can yield a rapid, sensitive, reversible and reproducible response to the stimulant of nerve agent. The gas sensitivity is as high as 80 kHz/ppm, which is orders of magnitude higher than that of quartz crystal microbalance. The advantages of this sensor, including the sample fabrication process, ease of detection method, rapid response and high sensitivity, make this promising in the early alarm of nerve agents.

Inspec keywords: gas sensors; microbalances; acoustic resonators

Other keywords: nerve agent; chemical recognition; nerve gas sensor; polyvinylidene fluoride; film bulk acoustic resonator; quartz crystal microbalance; sample fabrication process

Subjects: Acoustic wave devices; Chemical sensors; Chemical sensors

References

    1. 1)
      • G. Zuo , X. Li , P. Li , T. Yang , Y. Wang , Z. Cheng , S. Feng . Detection of trace organophosphorus vapor with a self-assembled bilayer functionalized SiO2 microcantilever piezoresistive sensor. Anal. Chim. Acta , 2 , 123 - 127
    2. 2)
      • C.E.A.M. Degenhardt-Langelaan , C.E. Kientz . Capillary gas chromatographic analysis of nerve agents using large volume injections. J. Chromatograph A , 210 - 214
    3. 3)
      • J. Huang , Y. Jiang , X. Du , J. Bi . A new siloxane polymer for chemical vapor sensor. Sens. Actuators B, Chem. , 1 , 388 - 394
    4. 4)
      • Z. Ying , Y. Jiang , X. Du , G. Xie , J. Yu , H. Tai . Polymer coated sensor array based on quartz crystal microbalance for chemical agent analysis. Eur. Polym. J. , 4 , 1157 - 1164
    5. 5)
      • W. Xu , S. Choi , J. Chae . A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications. Appl. Phys. Lett. , 5 , 053703 - 053703
    6. 6)
      • A. Mulchandani . Amperometric thick-film strip electrodes for monitoring organophosphate nerve agents based on immobilized organophosphorus hydrolase. Anal. Chem. , 11 , 2246 - 2249
    7. 7)
      • N. Kim , I.S. Park , D.K. Kim . High-sensitivity detection for model organophosphorus and carbamate pesticide with quartz crystal microbalance-precipitation sensor. Biosens. Bioelectron. , 8 , 1593 - 1599
    8. 8)
    9. 9)
      • G. Liu , Y. Lin . Biosensor based on self-assembling acetylcholinesterase on carbon nanotubes for flow injection/amperometric detection of organophosphate pesticides and nerve agents. Anal. Chem. , 3 , 835 - 843
    10. 10)
    11. 11)
      • M.A.K. Khan , Y.T. Long , G. Schatte , H.B. Kraatz . Surface studies of aminoferrocene derivatives on gold: electrochemical sensors for chemical warfare agents. Anal. Chem. , 7 , 2877 - 2884
    12. 12)
      • M. Nirschl , A. Blleer , C. Erler , B. Katzschner , I. Vikholm-Lundin , S. Auer , J. Vertwl , W. Pompe , M. Schreiter , M. Mertig . Film bulk acoustic resonators for DNA and protein detection and investigation of in vitro bacterial S-layer formation. Sens. Actuators A , 1 , 180 - 184
    13. 13)
      • M. Penza , P. Aversa , G. Cassano , D. Suriano , W. Wlodarski , M. Benetti , D. Cannatà , F.D. Pietrantonio , E. Verona . Thin-film bulk-acoustic-resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes. IEEE Trans. Electron Devices , 5 , 1237 - 1243
    14. 14)
      • Z. Ying , Y. Jiang , X. Du , G. Xie , J. Yu , H. Wang . PVDF coated quartz crystal microbalance sensor for DMMP vapor detection. Sens. Actuators B , 1 , 167 - 172
    15. 15)
    16. 16)
      • K.L. Yang , K. Cadwell , N.L. Abbott . Use of self-assembled monolayers, metal ions and smectic liquid crystals to detect organophosphonates. Sens. Actuators B , 1 , 50 - 56
    17. 17)
    18. 18)
      • H. Xie , Q.D. Yang , X. Sun , T. Yu , J.Z. Huang , Y. Huang . Gas sensors based on nanosized-zeolite films to identify dimethylmethylphosphonate. Sens. Mater. , 1 , 21 - 28
    19. 19)
      • A.T. Nimal , U. Mittal , M. Singh , M. Khaneja , G.K. Kannan , J.C. Kapoor , V. Dubey , P.K. Gutch , G. Lal , K.D. Vyas , D.C. Gupta . Development of handheld SAW vapor sensors for explosives and CW agents. Sens. Actuators B , 399 - 410
    20. 20)
      • H. Zhang , W. Pang , M.S. Marma , C.-Y. Lee , S. Kamal-Bahl , E.S. Kim , C.E. McKenna . Label-free detection of protein-ligand interactions in real time using micromachined bulk acoustic resonators. Appl. Phys. Lett. , 123702 - 123705
http://iet.metastore.ingenta.com/content/journals/10.1049/el.2010.1724
Loading

Related content

content/journals/10.1049/el.2010.1724
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading