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Two-axis magnetometer using circular parallel-field Hall microsensor for contactless angle measurement

Two-axis magnetometer using circular parallel-field Hall microsensor for contactless angle measurement

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A new two-axis magnetometer for in-plane magnetic field measurement consisting of a circular parallel-field CMOS Hall-effect microsensor, biasing and signal conditioning circuits has been developed and tested. The sensing device contains a narrow n-well ring with a chain of 32 contacts spaced at regular intervals along the ring's circumference. The output magnetometer signal is a sine wave function. The magnitude of the in-plane magnetic field is directly proportional to the sine amplitude and the phase corresponds to the angle between the applied magnetic field and a reference direction. The signal conditioning electronics in hybrid implementation suppresses dynamically offset and low frequency 1/f noise.

References

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      • Ch. Roumenin , J. Korvink , O. Paul . (2006) Microsensors for magnetic field.
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      • Banjevic, M., Furrer, B., Popovic, R.S.: `2D CMOS integrated magnetometer based on the miniaturized circular vertical hall device', Transducers 2009, June 2009, Denver, CO, USA, p. 877–880.
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      • Kejik, P., Reymond, S., Popovic, R.S.: `Circular Hall transducer for angular position sensing', Proc. of Transducers '07 & Eurosensors XXI Conf., Dig. Tech. Pprs, 2007, Lyon, France, 2, p. 2593–2596.
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