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Pressure and temperature microsensor based on surface acoustic wave

Pressure and temperature microsensor based on surface acoustic wave

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  • Author(s): T.-L. Li 1 ; Z. Wu 2 ; H. Hu 1 ; L. Zheng 1
    • View affiliations
    • Affiliations: 1: Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen, People's Republic of China
      2: Shenzhen Graduate School, Shenzhen Institute of Advanced Integration Technology, Chinese Academy of Sciences / The Chinese University of Hong Kong, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, People's Republic of China
  • Source: Volume 45, Issue 6, 12 March 2009, p. 337 – 338
    DOI:  10.1049/el.2009.3129 , Print ISSN 0013-5194, Online ISSN 1350-911X
© The Institution of Engineering and Technology
Published

A novel microsensor based on a surface acoustic wave is reported, which is to measure pressure and temperature simultaneously. The kernel structure and design theory of this sensor with a single sensing unit are introduced. The excellent agreement between the pressure and temperature results measured by the sensor and the direct measurement data is presented.

Inspec keywords: pressure sensors; temperature sensors; microsensors; surface acoustic wave sensors

Other keywords: design theory; pressure microsensor; kernel structure; surface acoustic wave sensor; temperature microsensor

Subjects: Acoustic wave devices; Acoustical measurements and instrumentation; Sensing and detecting devices; Microsensors and nanosensors; Micromechanical and nanomechanical devices and systems

References

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      • Y.H. Kim , D.H. Chang , Y.S. Yoon . Study on the optimization of a temperature sensor based on SAW delay line. J. Korean Phys. Soc. , 5 , 1366 - 1371
    2. 2)
      • Bao, X.Q., Burkhard, W., Varadan, V.V., Varadan, V.K.: `SAW temperature sensor and remote reading system', Proc. IEEE Ultrasonics Symp., 1987, Denver, CO, USA, p. 583–585.
    3. 3)
    4. 4)
      • Li, T.L., Zheng, L., Hu, H.: `A novel wireless passive SAW sensor based on the delay line theory', Proc. 3rd IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, (NEMS′08), 2008, Sanya, China, p. 440–443.
    5. 5)
      • Ballandras, S., Lardat, R., Penavaire, L., Menage, P.: `Micro-machined, all quartz package, passive wireless SAW pressure and temperature sensor', IEEE Ultrasonics Symp., 2006, Vancouver, Canada, p. 1441–1444.
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