© The Institution of Engineering and Technology
A novel microsensor based on a surface acoustic wave is reported, which is to measure pressure and temperature simultaneously. The kernel structure and design theory of this sensor with a single sensing unit are introduced. The excellent agreement between the pressure and temperature results measured by the sensor and the direct measurement data is presented.
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http://iet.metastore.ingenta.com/content/journals/10.1049/el.2009.3129
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