Pressure and temperature microsensor based on surface acoustic wave

Pressure and temperature microsensor based on surface acoustic wave

For access to this article, please select a purchase option:

Buy article PDF
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Your details
Why are you recommending this title?
Select reason:
Electronics Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

A novel microsensor based on a surface acoustic wave is reported, which is to measure pressure and temperature simultaneously. The kernel structure and design theory of this sensor with a single sensing unit are introduced. The excellent agreement between the pressure and temperature results measured by the sensor and the direct measurement data is presented.


    1. 1)
      • Y.H. Kim , D.H. Chang , Y.S. Yoon . Study on the optimization of a temperature sensor based on SAW delay line. J. Korean Phys. Soc. , 5 , 1366 - 1371
    2. 2)
      • Bao, X.Q., Burkhard, W., Varadan, V.V., Varadan, V.K.: `SAW temperature sensor and remote reading system', Proc. IEEE Ultrasonics Symp., 1987, Denver, CO, USA, p. 583–585.
    3. 3)
    4. 4)
    5. 5)
      • Ballandras, S., Lardat, R., Penavaire, L., Menage, P.: `Micro-machined, all quartz package, passive wireless SAW pressure and temperature sensor', IEEE Ultrasonics Symp., 2006, Vancouver, Canada, p. 1441–1444.
    6. 6)
    7. 7)
      • Li, T.L., Zheng, L., Hu, H.: `A novel wireless passive SAW sensor based on the delay line theory', Proc. 3rd IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, (NEMS′08), 2008, Sanya, China, p. 440–443.

Related content

This is a required field
Please enter a valid email address