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Pressure and temperature microsensor based on surface acoustic wave

Pressure and temperature microsensor based on surface acoustic wave

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A novel microsensor based on a surface acoustic wave is reported, which is to measure pressure and temperature simultaneously. The kernel structure and design theory of this sensor with a single sensing unit are introduced. The excellent agreement between the pressure and temperature results measured by the sensor and the direct measurement data is presented.

References

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      • Li, T.L., Zheng, L., Hu, H.: `A novel wireless passive SAW sensor based on the delay line theory', Proc. 3rd IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, (NEMS′08), 2008, Sanya, China, p. 440–443.
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