Experiments for self-temperature-compensated characteristics of SAW gas sensor at fundamental and third-harmonic frequencies

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Experiments for self-temperature-compensated characteristics of SAW gas sensor at fundamental and third-harmonic frequencies

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A novel surface acoustic wave (SAW) gas sensor with self-temperature-compensated characteristics is proposed. Any type of piezoelectric crystal substrate irrelevant to their temperature coefficients of SAW velocities, can be adopted in this gas sensor. The sensing dynamic range can be extended utilising both the fundamental and third-harmonic frequency signals. Experimental results at the 75 MHz fundamental frequency and the 225 MHz third-harmonic frequency showed validity of the proposed sensor structure.

Inspec keywords: gas sensors; surface acoustic wave sensors

Other keywords: SAW velocities; SAW gas sensor; frequency 75 MHz; piezoelectric crystal substrate; self-temperature-compensated characteristic; sensing dynamic range; third-harmonic frequency signal; frequency 225 kHz; fundamental frequency signal; surface acoustic wave gas sensor

Subjects: Acoustic wave devices; Chemical sensors; Chemical sensors; Acoustical measurements and instrumentation

References

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      • Hikita, M.: `Surface acoustic wave gas sensor', 2007-280020, October 2007, Japanese Patent Pending, No..
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      • Hikita, M., Minami, K., Takimoto, K., Hiraizumi, Y.: `Investigation of novel surface acoustic wave (SAW) gas sensor used in senor network', Progress In Electromagnetic Research Symp. (PIERS), March 2008, p. 301–305.
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      • IEEE Standard 802.15.4: Wireless medium access control (MAC) and physical layer (PHY) specifications for low rate wireless personal area networks (LR-WPANs), 2003.
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      • Yamanaka, K., Ishikawa, S., Nakaso, N., Takeda, N., Mihara, T., Tsukahara, Y.: `Ball SAW devices for hydrogen gas sensor', IEEE Ultrasonics Symposium, 2003, p. 299–302.
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