IEE Seminar and Exhibition on MEMS Sensor Technologies

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  • Location: London, UK
  • Conference date: 25 April 2005
  • ISBN: 0 86341 523 7
  • Conference number: 2005/10812
  • The following topics are dealt with; micromechanical devices; gyroscopes; infrared detectors; microsensors; capacitive sensors; microsensors; and biosensors

16 items found

  • Development and commercialisation of silicon MEMS gyroscopes
  • Miniature mass spectrometry: status and prospects
  • High density chemical arrays scanned by SERS
  • New lab-on-a-chip formats for cell based analysis
  • High-sensitivity detectors for microfluidic systems
  • Electronic tongues
  • Protein engineering for biosensor design
  • Mechano-biochemistry
  • Development of high sensitivity silicon microseismometers
  • Practical pressure measurement using MEMS
  • MEMS microphone technology
  • Higher order sigma-delta modulator interfaces for capacitive sensors
  • MEMS MR detector coils
  • A resonant MEMS magnetometer
  • Design and fabrication of the SCUBA-2 detector for the JCM telescope
  • Uncooled pyroelectric detector arrays using ferroelectric ceramics and thin films
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