IEE Colloquium on Silicon Fabricated Inertial Instruments
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- Location: London, UK
- Conference date: 2 Dec. 1996
- Conference number: 1996/227
- The following topics were dealt with: small micro inertial sensors; monolithic Si gyroscope with simultaneous three-axis sensing; micromachined tuning fork gyroscope; micromachined rotating gyroscope; membrane gyroscope with electrostatic actuation; bulk micromachined capacitative force feedback accelerometer; polysilicon accelerometer; thin film piezoelectric layers for sensing and actuation in microstructures; SOI material for sensors and accelerometers