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Radiation enhanced diffusion of implanted palladium in a high-power P-i-N diode

Radiation enhanced diffusion of implanted palladium in a high-power P-i-N diode

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Inspec keywords: aluminium; annealing; p-i-n diodes; ion beam effects; carrier lifetime; ion implantation; palladium; elemental semiconductors; silicon; diffusion

Subjects: Semiconductor doping; Radiation effects (semiconductor technology); Annealing processes in semiconductor technology; Junction and barrier diodes

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