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Local donor doping by proton implantation in p+nn+ diodes fabricated on different silicon substrates

Local donor doping by proton implantation in p+nn+ diodes fabricated on different silicon substrates

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Inspec keywords: semiconductor doping; annealing; deep levels; ion implantation; elemental semiconductors; proton effects; deep level transient spectroscopy; power semiconductor diodes; silicon

Subjects: Radiation effects (semiconductor technology); Semiconductor doping; Annealing processes in semiconductor technology; Junction and barrier diodes; Power semiconductor devices

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