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Bio-inspired MEMS resonant thermal detector

Bio-inspired MEMS resonant thermal detector

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Inspec keywords: bioMEMS; CMOS integrated circuits; infrared detectors; heat radiation

Subjects: Micromechanical and nanomechanical devices and systems; Biophysical instrumentation and techniques; Materials for MEMS and NEMS device technology; Photodetectors; Transport processes: theory; CMOS integrated circuits; Detection of radiation (bolometers, photoelectric cells, i.r. and submillimetre waves detection)

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