Bio-inspired MEMS resonant thermal detector
Bio-inspired MEMS resonant thermal detector
- Author(s): M.E. McNie ; D.J. Combes ; R.R. Davies ; K.M. Brunson ; K.L. Lewis ; D.J. Hamilton ; L. Mankondo ; C.J. Anthony ; C.A. Hill ; M. Harris ; P.P. Donohue ; M.A. Todd
- DOI: 10.1049/ic:20060449
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- Author(s): M.E. McNie ; D.J. Combes ; R.R. Davies ; K.M. Brunson ; K.L. Lewis ; D.J. Hamilton ; L. Mankondo ; C.J. Anthony ; C.A. Hill ; M. Harris ; P.P. Donohue ; M.A. Todd Source: IET Seminar on MEMS Sensors and Actuators, 2006 p. 83 – 90
- Conference: IET Seminar on MEMS Sensors and Actuators
- DOI: 10.1049/ic:20060449
- ISBN: 0 86341 627 6
- Location: London, UK
- Conference date: 27-28 April 2006
- Format: PDF
There are many examples of creatures in the natural world with the ability to sense thermal radiation including pit vipers and fire-seeking beetles. This work has sought inspiration from sensors in the natural world and has investigated a disruptive MEMS-based technology with the potential to achieve high performance uncooled infra red detection at low cost. The novel transduction is based on individual resonant elements changing their frequency with temperature. Devices have been designed and post-processed on standard silicon CMOS substrates in a standard materials set. Measurements of thermal sensitivity are in good agreement with predictions and the device has the potential for 40-60 mK NETD performance.
Inspec keywords: bioMEMS; CMOS integrated circuits; infrared detectors; heat radiation
Subjects: Micromechanical and nanomechanical devices and systems; Biophysical instrumentation and techniques; Materials for MEMS and NEMS device technology; Photodetectors; Transport processes: theory; CMOS integrated circuits; Detection of radiation (bolometers, photoelectric cells, i.r. and submillimetre waves detection)
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