VLSI design and fabrication for liquid crystal on silicon
VLSI design and fabrication for liquid crystal on silicon
- Author(s): I. Underwood
- DOI: 10.1049/ic:20000026
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- Author(s): I. Underwood Source: IEE Seminar on Microdisplay and Smart Pixel Technologies, 2000 page ()
- Conference: IEE Seminar on Microdisplay and Smart Pixel Technologies
This paper attempts a very brief review of the principles of, and some recent advances in, the design and custom fabrication of silicon chips for use with liquid crystals in spatial light modulators and microdisplays. (6 pages)
Inspec keywords: liquid crystal devices; optical backplanes; VLSI; spatial light modulators; light valves; CMOS integrated circuits; liquid crystal displays; smart pixels
Subjects: Liquid crystal devices; Integrated optoelectronics; CMOS integrated circuits; Display equipment and systems
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