Micro-actuation using thin film piezoelectric elements
Micro-actuation using thin film piezoelectric elements
- Author(s): M.J. Cunningham
- DOI: 10.1049/ic:19971055
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- Author(s): M.J. Cunningham Source: IEE Colloquium on Electro-Technical Ceramics - Processing, Properties and Applications, 1997 page ()
- Conference: IEE Colloquium on Electro-Technical Ceramics - Processing, Properties and Applications
Inspec keywords: transient response; piezoelectric actuators; vibration control; physical instrumentation control; microactuators; adaptive control; scanning probe microscopy
Subjects: Piezoelectric and ferroelectric devices; Servo and control devices; Self-adjusting control systems; Sensing devices and transducers; Electron and ion microscopes and techniques; Scanning probe microscopy determinations of structures; Control gear and apparatus; Small and special purpose electric machines; Electric actuators and final control equipment; MEMS and NEMS device technology; Mechanical variables control; Control of physical instruments