Micro-actuation using thin film piezoelectric elements

Micro-actuation using thin film piezoelectric elements

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Inspec keywords: transient response; vibration control; piezoelectric actuators; physical instrumentation control; microactuators; adaptive control; scanning probe microscopy

Subjects: Piezoelectric and ferroelectric devices; Servo and control devices; Self-adjusting control systems; Sensing devices and transducers; Electron and ion microscopes and techniques; Scanning probe microscopy determinations of structures; Control gear and apparatus; Small and special purpose electric machines; Electric actuators and final control equipment; MEMS and NEMS device technology; Mechanical variables control; Control of physical instruments

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