Inspec keywords: surface acoustic wave sensors; semiconductor thin films; strain sensors; piezoelectric semiconductors; zinc compounds; surface acoustic wave resonators; sputter deposition; sputtered coatings; II-VI semiconductors; piezoelectric thin films
Subjects: Mechanical variables measurement; Mechanical and acoustical properties of solid surfaces and interfaces; Piezoelectricity and electrostriction; Thin film growth, structure, and epitaxy; Deposition by sputtering; II-VI and III-V semiconductors; Measurement by acoustic techniques; Piezoelectric and ferroelectric materials; Sensing devices and transducers; Sensing and detecting devices; Acoustic wave devices; Measurement of mechanical variables; Dielectric thin films; Chemical vapour deposition