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access icon free Processing of ZnO thin films for SAW devices

Inspec keywords: surface acoustic wave sensors; semiconductor thin films; strain sensors; piezoelectric semiconductors; zinc compounds; surface acoustic wave resonators; sputter deposition; sputtered coatings; II-VI semiconductors; piezoelectric thin films

Subjects: Mechanical variables measurement; Mechanical and acoustical properties of solid surfaces and interfaces; Piezoelectricity and electrostriction; Thin film growth, structure, and epitaxy; Deposition by sputtering; II-VI and III-V semiconductors; Measurement by acoustic techniques; Piezoelectric and ferroelectric materials; Sensing devices and transducers; Sensing and detecting devices; Acoustic wave devices; Measurement of mechanical variables; Chemical vapour deposition; Dielectric thin films

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content/conferences/10.1049/ic_19971053
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