Ferroelectrics, microsystems and nanotechnology
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- Author(s): R.W. Whatmore Source: IEE Colloquium on Electro-Technical Ceramics - Processing, Properties and Applications, 1997 page ()
- Conference: IEE Colloquium on Electro-Technical Ceramics - Processing, Properties and Applications
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Summary form only given. This talk will review the subject of nanotechnology and explore how new materials can be used to integrate sensing and actuation functions onto semiconductor chips, with the ultimate objective of permitting nanoscale fabrication and information storage. Ferroelectric materials offer a wide range of properties which can be used in such microsystems and nanotechnology, particularly the pyroelectric effect for thermal infrared detection and imaging and the piezoelectric effect for sensors (sound, acceleration, etc.), and for actuators (motors, pumps). The potential for ferroelectric thin and thick films to contribute to these fields will be discussed, and problems reviewed, especially from the aspect of materials and process integration. Specific examples of the factors critical to the growth and behaviour of the materials will be given and novel processing for the fabrication of thin and thick films of ferroelectrics discussed. (1 page)
Inspec keywords: micromechanical devices; microsensors; nanotechnology; lithography; microactuators; ferroelectric devices; thick films; ferroelectric thin films
Subjects: Piezoelectric and ferroelectric devices; MEMS and NEMS device technology; Lithography (semiconductor technology); Piezoelectric and ferroelectric materials; Electric transducers and sensing devices; Electric actuators and final control equipment; Small and special purpose electric machines; Sensing devices and transducers
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content/conferences/10.1049/ic_19971048
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