Generic technologies for micro-engineering (optical components)
Generic technologies for micro-engineering (optical components)
- Author(s): D. Wilson
- DOI: 10.1049/ic:19970005
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- Author(s): D. Wilson Source: IEE Colloquium on Microengineering and the Petrochemical Industry, 1997 page ()
- Conference: IEE Colloquium on Microengineering and the Petrochemical Industry
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Inspec keywords: flip-chip devices; microassembling; optical interconnections; oil refining; fibre optic sensors; microsensors; optical filters; optical fibre couplers; optical elements; photolithography; optical fabrication; optical sensors; optical planar waveguides
Subjects: Assembling; Spectral and other filters; Fibre optic sensors; fibre gyros; Integrated optics; Power applications in chemical and oil refining industries; Fibre optic sensors; Optical fabrication, surface grinding; Optoelectronics manufacturing; Fuel processing industry; Instrumentation; Optical waveguides and couplers; Optical coatings and filters; Optical waveguides; Optical fibre fabrication, cladding, splicing, joining; Integrated optics; Lithography (semiconductor technology); Microassembly techniques; MEMS and NEMS device technology