Inspec keywords: CMOS integrated circuits; silicon; bipolar integrated circuits; elemental semiconductors; piezoelectric actuators; electric sensing devices; microactuators; semiconductor technology; lead compounds; integrated circuit technology; piezoelectric transducers; microsensors
Subjects: MEMS and NEMS device technology; Sensing devices and transducers; Control gear and apparatus; Piezoelectric and ferroelectric devices; Semiconductor technology; Semiconductor integrated circuits