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access icon free Thin film piezoelectric layers for sensing and actuation in microstructures

Inspec keywords: CMOS integrated circuits; silicon; bipolar integrated circuits; elemental semiconductors; piezoelectric actuators; electric sensing devices; microactuators; semiconductor technology; lead compounds; integrated circuit technology; piezoelectric transducers; microsensors

Subjects: MEMS and NEMS device technology; Sensing devices and transducers; Control gear and apparatus; Piezoelectric and ferroelectric devices; Semiconductor technology; Semiconductor integrated circuits

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content/conferences/10.1049/ic_19961220
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