Mechanical characterisation of a polysilicon accelerometer
Mechanical characterisation of a polysilicon accelerometer
- Author(s): J.S. Burdess ; A.J. Harris ; R. Pitcher ; M. Ward ; D. King ; D. Wood
- DOI: 10.1049/ic:19961219
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- Author(s): J.S. Burdess ; A.J. Harris ; R. Pitcher ; M. Ward ; D. King ; D. Wood Source: IEE Colloquium on Silicon Fabricated Inertial Instruments, 1996 page ()
- Conference: IEE Colloquium on Silicon Fabricated Inertial Instruments
Inspec keywords: elemental semiconductors; mechanical variables measurement; finite element analysis; accelerometers; mechanical engineering computing; measurement by laser beam; vibration measurement; damping; characteristics measurement; piezoelectric transducers; microsensors; bending; silicon; dynamic testing
Subjects: Mechanical variables measurement; Velocity, acceleration and rotation measurement; Laser applications; Optoelectronics manufacturing; Piezoelectric and ferroelectric devices; Velocity, acceleration and rotation measurement; Sensing devices and transducers; Civil and mechanical engineering computing; MEMS and NEMS device technology; Numerical analysis; Numerical approximation and analysis; Structural acoustics and vibration; Finite element analysis; Finite element analysis; Measurement of mechanical variables