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Mechanical characterisation of a polysilicon accelerometer

Mechanical characterisation of a polysilicon accelerometer

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Inspec keywords: elemental semiconductors; mechanical variables measurement; finite element analysis; accelerometers; mechanical engineering computing; measurement by laser beam; vibration measurement; damping; characteristics measurement; piezoelectric transducers; microsensors; bending; silicon; dynamic testing

Subjects: Mechanical variables measurement; Velocity, acceleration and rotation measurement; Laser applications; Optoelectronics manufacturing; Piezoelectric and ferroelectric devices; Velocity, acceleration and rotation measurement; Sensing devices and transducers; Civil and mechanical engineering computing; MEMS and NEMS device technology; Numerical analysis; Numerical approximation and analysis; Structural acoustics and vibration; Finite element analysis; Finite element analysis; Measurement of mechanical variables

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