A monolithic silicon gyroscope capable of sensing about three axes simultaneously
A monolithic silicon gyroscope capable of sensing about three axes simultaneously
- Author(s): D. Wood ; G. Cooper ; J.S. Burdess ; A.J. Harris ; J.L. Cruickshank
- DOI: 10.1049/ic:19961214
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- Author(s): D. Wood ; G. Cooper ; J.S. Burdess ; A.J. Harris ; J.L. Cruickshank Source: IEE Colloquium on Silicon Fabricated Inertial Instruments, 1996 page ()
- Conference: IEE Colloquium on Silicon Fabricated Inertial Instruments
In recent years there have been many designs proposed for silicon microengineered gyroscopes. Early results bode well for the future fabrication of these devices in the volume requirement of the user, principally the automotive industry. These devices are expected to be economical favourable to manufacture when compared to other forms of rate sensor. Additional benefits of compactness, reliability and simplicity are all expected to weigh in favour of microengineering as the way forward to the mass manufacture of automotive gyroscopes. However, they may still not be economical enough for the industry. One reason for this is that in many applications a measure of rate of turn is often required about three orthogonal axes simultaneously-for instance the roll, pitch and yaw axes of a car. With present technology this will require three independent gyroscopes, hence tripling the cost. To date, no gyroscope able to measure three axes independently and simultaneously using any technology has been made, let alone via microengineering. (3 pages)
Inspec keywords: microsensors; integrated circuit technology; electric sensing devices; elemental semiconductors; reliability; gyroscopes; silicon
Subjects: Semiconductor integrated circuits; Aerospace instrumentation and equipment; MEMS and NEMS device technology; Sensing devices and transducers
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