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Inspec keywords: micromechanical devices; doping profiles; surface structure; etching; silicon; Raman spectroscopy; micromachining; elemental semiconductors; surface enhanced Raman scattering
Subjects: MEMS and NEMS device technology; Sensing devices and transducers; Solid surface structure; Optical spectroscopy and spectrometers; Infrared and Raman spectra in inorganic crystals; Impurity concentration, distribution, and gradients; Surface treatment and degradation in semiconductor technology; Surface treatment (semiconductor technology); Semiconductor doping; Elemental semiconductors