Improving the localization of electrochemical micro-manufacturing with nanosecond pulse duration
Improving the localization of electrochemical micro-manufacturing with nanosecond pulse duration
- Author(s): Qu Ningsong ; Zhu Di ; Xie Xiaofen
- DOI: 10.1049/cp:20061063
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- Author(s): Qu Ningsong ; Zhu Di ; Xie Xiaofen Source: International Technology and Innovation Conference 2006 (ITIC 2006), 2006 p. 1829 – 1832
- Conference: International Technology and Innovation Conference 2006 (ITIC 2006)
- DOI: 10.1049/cp:20061063
- ISBN: 0 86341 696 9
- Location: Hangzhou, China
- Conference date: 6-7 Nov. 2006
- Format: PDF
With the development of MEMS, electrochemical micro-manufacturing, as a part of micro-machining, has been attached much attention. In electrochemical manufacturing, localization is closely related with the accuracy, and the accuracy will be improved when the localization is enhanced. In our paper, the nanosecond pulse duration power generator is employed to enhance the localization. Micro holes are electrochemical drilled in nickel using nanosecond pulse power, millisecond pulse power and direct current power. The experimental results show that the localization could be significantly enhanced using nanosecond pulse power. The maximum localization is got at the pulse duration of 10ns. Cu dots are electrodeposited using nanosecond pulse power, millisecond pulse power and direct current power. The results indicate that the localization could be significantly enhanced using nanosecond pulse power. The maximum localization is got at the pulse duration of 200ns and the current is 100mA.
Inspec keywords: micromechanical devices; micromachining; electrochemical machining; electrodeposition; drilling
Subjects: Mechanical components; Fabrication of MEMS and NEMS devices; Machining; Micromechanics (mechanical engineering); Surface treatment and coating techniques
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