Research on micro/nanometre measuring technique of optical aspheric surface
Research on micro/nanometre measuring technique of optical aspheric surface
- Author(s): Liu Jianchun ; Guo Yinbiao ; Liu Gujin
- DOI: 10.1049/cp:20060964
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- Author(s): Liu Jianchun ; Guo Yinbiao ; Liu Gujin Source: International Technology and Innovation Conference 2006 (ITIC 2006), 2006 p. 1290 – 1294
- Conference: International Technology and Innovation Conference 2006 (ITIC 2006)
- DOI: 10.1049/cp:20060964
- ISBN: 0 86341 696 9
- Location: Hangzhou, China
- Conference date: 6-7 Nov. 2006
- Format: PDF
The machining accuracy of optical aspheric surface can reach nanometre, but micro/nanometre measurement is the bottleneck for us to improve the accuracy. Aiming at various influential factors during the high-precision aspheric surface testing, the building up of three-dimensional nanometre motion platform is the key technology. The movement of high precision linear motor on the motion platform is controlled by computer. Then the motors drive the laser sensor to the position (X, Y, Z) on the aspheric surface which is needed to inspect. Then the position is inspecting by the sensor built in the platform. Through data processing and analyzing, the result of analysing and evaluation of the aspheric surface are got. At last, this measurement system can provide data for compensation processing to the numerical machine tools to improve the profile accuracy of the aspheric surface.
Inspec keywords: optical testing; aspherical optics; automatic optical inspection; surface topography measurement; measurement uncertainty; mirrors
Subjects: Optical testing techniques; Spatial variables measurement; Optical lenses and mirrors; Measurement and error theory
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