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Inspec keywords: capacitance; topology; finite element analysis; gyroscopes; micromachining; vibrations; micromechanical devices
Subjects: Machining; Design and modelling of MEMS and NEMS devices; Mechanical components, systems and devices; Micromechanics (mechanical engineering); Numerical analysis; Combinatorial mathematics; Mechatronics industry; Vibrations and shock waves (mechanical engineering)