Analysis for performance of a vibratory micromachined gyroscope based on mode-acceleration method
Analysis for performance of a vibratory micromachined gyroscope based on mode-acceleration method
- Author(s): Jang Jongbok ; Wang Anlin ; Liu Guangjun ; Jiang Tao ; Jiao Jiwei
- DOI: 10.1049/cp:20060837
For access to this article, please select a purchase option:
Buy conference paper PDF
Buy Knowledge Pack
IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.
International Technology and Innovation Conference 2006 (ITIC 2006) — Recommend this title to your library
Thank you
Your recommendation has been sent to your librarian.
- Author(s): Jang Jongbok ; Wang Anlin ; Liu Guangjun ; Jiang Tao ; Jiao Jiwei Source: International Technology and Innovation Conference 2006 (ITIC 2006), 2006 p. 634 – 639
- Conference: International Technology and Innovation Conference 2006 (ITIC 2006)
- DOI: 10.1049/cp:20060837
- ISBN: 0 86341 696 9
- Location: Hangzhou, China
- Conference date: 6-7 Nov. 2006
- Format: PDF
In the study of robust design of the performance of the micromachined gyroscope, in order to solve the problems concerning to the high precision and the computing time of performance analysis of micromachined gyroscope, a tuning fork vibratory micromachined gyroscope fabricated by the bulk silicon micromachining technology has been studied. The dynamic analysis method of the microstructure based on the substructuring method has been introduced, and on the basis of having realized the analysis of the micromachined gyroscope with the high degree accuracy, the optimum design of the micromachined gyroscope elastic bars has been carried out. Elastic bar of micromachined gyroscope with excellent performance is obtained. The analysis results not only show the validity of the dynamic analysis method of microstructure based on substructuring method, but also verify the potential values in the design of micromachined gyroscope performance.
Inspec keywords: vibrations; micromachining; dynamic testing; gyroscopes; design engineering; elasticity; bars
Subjects: Micromechanics (mechanical engineering); Vibrations and shock waves (mechanical engineering); Mechatronics industry; Machining; Elasticity (mechanical engineering); Design and modelling of MEMS and NEMS devices; Mechanical components, systems and devices; Design
Related content
content/conferences/10.1049/cp_20060837
pub_keyword,iet_inspecKeyword,pub_concept
6
6