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Inspec keywords: crystal resonators; electric sensing devices; thermal stability; thermal analysis; microbalances; piezoelectric materials; piezoelectric devices; mechanical stability; gallium compounds; microsensors
Subjects: Sensing and detecting devices; Piezoelectric devices; Piezoelectric and ferroelectric materials; Micromechanical and nanomechanical devices and systems; Materials for MEMS and NEMS device technology; Microsensors and nanosensors