Microbalance sensor applications using the piezoelectric crystal material GaPO4
Microbalance sensor applications using the piezoelectric crystal material GaPO4
- Author(s): F. Krispel ; C. Reiter ; R. Schauperl ; I. Mannelli ; W. Wallnofer
- DOI: 10.1049/cp:20040929
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- Author(s): F. Krispel ; C. Reiter ; R. Schauperl ; I. Mannelli ; W. Wallnofer Source: 18th European Frequency and Time Forum (EFTF 2004), 2004 p. 565 – 568
- Conference: 18th European Frequency and Time Forum (EFTF 2004)
- DOI: 10.1049/cp:20040929
- ISBN: 0-86341-384-6
- Location: Guildford, UK
- Conference date: 5-7 April 2004
- Format: PDF
Inspec keywords: crystal resonators; electric sensing devices; thermal stability; thermal analysis; microbalances; piezoelectric materials; piezoelectric devices; mechanical stability; gallium compounds; microsensors
Subjects: Sensing and detecting devices; Piezoelectric devices; Piezoelectric and ferroelectric materials; Micromechanical and nanomechanical devices and systems; Materials for MEMS and NEMS device technology; Microsensors and nanosensors