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Inspec keywords: dielectric measurement; permittivity; permittivity measurement; microwave measurement; microfluidics; Q-factor; finite element analysis; bridges (structures); micromechanical resonators
Subjects: MEMS and NEMS device technology; Numerical approximation and analysis; Waveguide and microwave transmission line components; Dielectric variables measurement; Finite element analysis; Electrical instruments and techniques; Sensing and detecting devices; Micromechanical and nanomechanical devices and systems; Microwave measurement techniques