A high speed on/off valve Actuator (HSVA) is a main interface between electronic control and hydraulic system for most fluid power applications such as braking systems of vehicles and aircrafts. Accurate theoretical model is the key to control the high speed on/off valve smoothly. However, modeling of a HSVA is a challenging difficulty due to the unavoidable multi-physics coupling problems in practice. For establishing mathematical model of a HSVA accurately, this study dismantles the coupling model into three interrelated sub-models, including a mechanical sub-model, an electromagnetic sub-model, and a thermal sub-model. And then, these three subsystems are modeled as a spring/mass/damper system, a nonlinear resistor/inductor system and a multi-wall heat transfer system, separately. At last, the feasibility of above three sub-models is verified by comparing the simulation results with the experimental results obtained on a test bench. Our study shows that the three subsystems are coupled to each other through resistance, displacement, and temperature. Besides, our results can be regarded as a research tool for future investigation and development of the Solenoid valves.