Optical low-coherence reflectometry for non-destructive testing of silicon micromachined devices
Optical low-coherence reflectometry for non-destructive testing of silicon micromachined devices
- Author(s): F. Carpignano ; S. Surdo ; G. Barillaro ; S. Merlo
- DOI: 10.1049/cp.2016.0908
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- Author(s): F. Carpignano ; S. Surdo ; G. Barillaro ; S. Merlo Source: 18th Italian National Conference on Photonic Technologies (Fotonica 2016), 2016 page ()
- Conference: 18th Italian National Conference on Photonic Technologies (Fotonica 2016)
- DOI: 10.1049/cp.2016.0908
- ISBN: 978-1-78561-268-8
- Location: Rome, Italy
- Conference date: 6-8 June 2016
- Format: PDF
Inspec keywords: nondestructive testing; micro-optomechanical devices; distance measurement; elemental semiconductors; optical arrays; reflectometry; fibre optic gyroscopes; Michelson interferometers; optical design techniques; fibre optic sensors; optical testing; silicon
Subjects: Optical interferometry; Fibre optics; Optical refractometry and reflectometry; MEMS and NEMS device technology; Fibre optic sensors; fibre gyros; Micro-optical devices and technology; Micro-optical devices and technology; Optical system design; Spatial variables measurement; Spatial variables measurement; Fibre optic sensors