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Inspec keywords: nondestructive testing; optical arrays; micro-optomechanical devices; distance measurement; elemental semiconductors; reflectometry; fibre optic gyroscopes; Michelson interferometers; optical design techniques; fibre optic sensors; optical testing; silicon
Subjects: Optical interferometry; Fibre optics; Optical refractometry and reflectometry; MEMS and NEMS device technology; Fibre optic sensors; fibre gyros; Micro-optical devices and technology; Micro-optical devices and technology; Optical system design; Spatial variables measurement; Spatial variables measurement; Fibre optic sensors