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On Regression Methods for Virtual Metrology in Semiconductor Manufacturing

On Regression Methods for Virtual Metrology in Semiconductor Manufacturing

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25th IET Irish Signals & Systems Conference 2014 and 2014 China-Ireland International Conference on Information and Communications Technologies (ISSC 2014/CIICT 2014) — Recommend this title to your library

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Inspec keywords: semiconductor device manufacture; learning (artificial intelligence); shrinkage; regression analysis; manufacturing processes; neural nets; Gaussian processes; production engineering computing; semiconductor device measurement

Subjects: Measurement; Production engineering computing; Industrial applications of IT; Other topics in statistics; Semiconductor devices; Manufacturing processes; Neural computing techniques; Other topics in statistics; Statistics; Semiconductor industry; Knowledge engineering techniques; Production facilities and engineering; Electronic engineering computing

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