For access to this article, please select a purchase option:
IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.
Your recommendation has been sent to your librarian.
Inspec keywords: platinum; humidity sensors; cantilevers; microsensors; mathematics computing; capacitance; electrodes
Subjects: Design and modelling of MEMS and NEMS devices; Humidity measurement; Micromechanical and nanomechanical devices and systems; Microsensors and nanosensors; Sensing and detecting devices; Hygrometry