Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser

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Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser

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  • DOI:  10.1049/cp.2010.1165
  • ISBN: 978-1-84919-314-6
  • Location: Nanjing, China
  • Conference date: 24-27 Oct. 2010
  • Format: PDF
Through laser ablation process, a diaphragm with mesa structure is fabricated successfully in silicon wafer with Nd:YAG laser machining system. Then the silicon diaphragm is used to make optical fiber Fabry-Perot pressure sensor. The pressure sensing experiment showed the sensor had a good linear response with sensitivity 10.6 nm/kPa at the range 40-240 kPa.

Inspec keywords: neodymium; laser beam machining; solid lasers; laser ablation; fibre optic sensors; pressure sensors

Subjects: Fibre optic sensors; fibre gyros; Laser materials processing; Laser materials processing; Sensing and detecting devices; Fibre optic sensors; Solid lasers; Lasing action in other solids

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