For access to this article, please select a purchase option:
Buy conference paper PDF
Buy Knowledge Pack
IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.
Through laser ablation process, a diaphragm with mesa structure is fabricated successfully in silicon wafer with Nd:YAG laser machining system. Then the silicon diaphragm is used to make optical fiber Fabry-Perot pressure sensor. The pressure sensing experiment showed the sensor had a good linear response with sensitivity 10.6 nm/kPa at the range 40-240 kPa.