Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser
Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser
- Author(s): Junfeng Jiang ; Tiegen Liu ; Kun Liu ; Lijuan Jiang ; Xiao Liang ; Yu Liu ; Meng Wang ; Cong Xu ; Yimo Zhang ; Xuejin Li
- DOI: 10.1049/cp.2010.1165
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- Author(s): Junfeng Jiang ; Tiegen Liu ; Kun Liu ; Lijuan Jiang ; Xiao Liang ; Yu Liu ; Meng Wang ; Cong Xu ; Yimo Zhang ; Xuejin Li Source: 9th International Conference on Optical Communications and Networks (ICOCN 2010), 2010 p. 112 – 115
- Conference: 9th International Conference on Optical Communications and Networks (ICOCN 2010)
- DOI: 10.1049/cp.2010.1165
- ISBN: 978-1-84919-314-6
- Location: Nanjing, China
- Conference date: 24-27 Oct. 2010
- Format: PDF
Through laser ablation process, a diaphragm with mesa structure is fabricated successfully in silicon wafer with Nd:YAG laser machining system. Then the silicon diaphragm is used to make optical fiber Fabry-Perot pressure sensor. The pressure sensing experiment showed the sensor had a good linear response with sensitivity 10.6 nm/kPa at the range 40-240 kPa.
Inspec keywords: neodymium; laser beam machining; solid lasers; laser ablation; fibre optic sensors; pressure sensors
Subjects: Fibre optic sensors; fibre gyros; Laser materials processing; Laser materials processing; Sensing and detecting devices; Fibre optic sensors; Solid lasers; Lasing action in other solids
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