A new saw device with tellurium sensing film for NO2 detection
A new saw device with tellurium sensing film for NO2 detection
- Author(s): Xuefeng Yan ; Dongmei Li ; Ming Liu ; Tianchun Ye
- DOI: 10.1049/cp.2010.0740
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- Author(s): Xuefeng Yan ; Dongmei Li ; Ming Liu ; Tianchun Ye Source: 2010 International Conference on Advanced Intelligence and Awareness Internet (AIAI 2010), 2010 p. 146 – 148
- Conference: 2010 International Conference on Advanced Intelligence and Awareness Internet (AIAI 2010)
- DOI: 10.1049/cp.2010.0740
- ISBN: 978-1-84919-206-4
- Location: Beijing, China
- Conference date: 23-25 Oct. 2010
- Format: PDF
A new surface acoustic wave device is demonstrated using tellurium (Te) sensing film on ST-X quartz substrate to detect NO2 dynamically at room temperature. The real-time frequency shift as a function of NO2 gas concentration is collected by Universal Counter. Devices with three different Te thicknesses of 60, 120 and 180 nm have been compared. It is found that the device with 120 nm Te film has the largest frequency shift, the device with 180 nm Te film follows and the device with 60 nm Te film shows the smallest frequency shift.
Inspec keywords: tellurium; quartz; chemical sensors; nitrogen compounds; surface acoustic wave sensors
Subjects: Acoustic wave devices; Acoustical measurements and instrumentation; Chemical sensors; Chemical sensors
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