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SIMOX

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Editor: Maria J. Anc 1
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Publication Year: 2004

SIMOX represents the first effort to compile a broad spectrum of knowledge from various groups of researchers and technologists in the world. It provides the reader with a basic understanding of SIMOX technology and in addition gives a good starting point for further investigation and applications.

Inspec keywords: annealing; ion implantation; SIMOX

Other keywords: high temperature annealing; separation-by-implanted-oxygen technology; SIMOX; silicon-on-insulator structures

Subjects: Annealing processes in semiconductor technology; Metal-insulator-semiconductor structures; Semiconductor doping

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