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MEMS Resonator Filters

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Editor: Rajendra M. Patrikar 1
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Publication Year: 2020

The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need to be considered. This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed. Materials and their selection, CAD tools for system design and the integration of MEMS with CMOS circuitry, and the design, fabrication, testing and packaging of MEMS filters themselves are addressed in detail. Case studies where resonator MEMS have been used as components have been included to encourage readers to consider the practical applications of this technology. MEMS Resonator Filters is essential reading for the analogue circuit designer community, particularly those who are designing circuits for wireless communications, and CMOS technology researchers and engineers who are involved in the fabrication of circuits. Designers of sensors and interfacing circuits will also be interested since resonators are also being used as sensors.

Inspec keywords: integrated circuit modelling; three-dimensional integrated circuits; integrated circuit design; surface acoustic wave resonators; surface acoustic wave resonator filters; bulk acoustic wave devices; radiofrequency filters; microfabrication; integrated circuit testing; integrated circuit reliability; finite element analysis; micromechanical resonators; integrated circuit packaging; radiofrequency integrated circuits; radiofrequency oscillators; integrated circuit manufacture

Other keywords: low-frequency resonators fabrication; reliability issues; resonator filters verification; oscillator design; heterogeneous systems integration; filter design; MEMS resonator filters testing; RF MEMS resonators; high-frequency resonators fabrication; finite-element modeling; MEMS resonator filters; 3D packaging; microelectromechanical resonators design; SAW-BAW resonators

Subjects: Finite element analysis; Microwave integrated circuits; Semiconductor integrated circuit design, layout, modelling and testing; General fabrication techniques; Passive filters and other passive networks; Reliability; Product packaging; Production facilities and engineering; General electrical engineering topics; MEMS and NEMS device technology; Oscillators; Acoustic wave devices

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