As the field of subwavelength optics continues to boom and novel nanophotonic device designs emerge (as other chapters in this book highlight), existing nanofabrication methods will continue to evolve and new technologies will surface to keep pace with the increasingly sophisticated demands. We foresee that the crossroads of ingenious nanophotonic designs and nanofabrication techniques will thrive as a leading source of inspiration for researchers aspiring to explore the field. In this spirit, it is the authors' hope that this chapter can serve as a convenient solution guide to both theorists and experimentalists who are exploring unconventional subwavelength structures. Finally, we hope that the discussions here can further inspire design and process innovations in the dynamic field of subwavelength optics, where 'there is plenty of room at the bottom' for both dancing angels and optical engineers alike.

Chapter Contents:

• 11.1 Opening remarks
• 11.2 Standard planar nanofabrication technologies applied to subwavelength optics
• 11.2.1 Materials for subwavelength optics
• 11.2.1.1 Plasmonic subwavelength optics
• 11.2.1.2 Silicon-based materials
• 11.2.1.3 III–V-based materials
• 11.2.1.4 Chalcogenide compounds
• 11.2.1.5 Phase-change materials
• 11.2.1.6 2D van der Waals materials
• 11.2.2 Large-scale manufacturing: a case study of optical metasurfaces
• 11.3 Innovative solutions to nonconventional subwavelength optics designs
• 11.3.1 HAR nanostructures
• 11.3.1.1 Reactive-ion etching
• 11.3.1.2 Conformal atomic layer deposition on a template
• 11.3.1.3 Metal-assisted chemical etching
• 11.3.2 3D structures
• 11.3.2.1 Two-photon polymerization
• 11.3.2.2 Interference lithography
• 11.3.2.3 Membrane projection lithography
• 11.3.2.4 DNA-assisted nanoparticle assembly
• 11.3.3 Fabrication on unconventional substrates
• 11.3.3.1 Integration on flexible and stretchable substrates
• 11.3.3.2 Subwavelength optics fabrication on non-planar and irregular substrates
• 11.3.3.3 The tip of a fiber—a new dancing stage for photonic engineers
• 11.4 Summary and outlook
• References

Inspec keywords: nanophotonics; nanofabrication

Other keywords: nanofabrication; nanophotonic designs; optical engineers; nanophotonic device; subwavelength optics; dancing angels

Subjects: Nanophotonic devices and technology; General electrical engineering topics; Textbooks; Methods of nanofabrication and processing; Nanophotonic devices and technology