In this book chapter, the authors summarize the main developments and improvements within the last 25 years which enabled the industrialization of the lab-type PERC solar cell concept. In particular, we describe the historic development and current status of key industrial PERC manufacturing process steps such as the rear passivation layer, typically applying an AlOx/SiNy layer stack, as well as the local Al rear contact formation by laser ablation, Al screen printing and subsequent firing. At the end of this chapter, an outlook is provided on future development opportunities such as further efficiency increases and bifacial PERC applications.

Chapter Contents:

• 8.1 Introduction
• 8.2 Brief historical review
• 8.3 Emitter passivation
• 8.4 Rear passivation technologies
• 8.5 Local aluminum rear contacts
• 8.6 Industrial PERC process flows
• 8.6.1 PERC process with rear protection layer
• 8.6.2 PERC process with rear polishing
• 8.7 Outlook
• References

Inspec keywords: reviews; aluminium; semiconductor industry; silicon; passivation; pulsed laser deposition; silicon compounds; aluminium compounds; history; elemental semiconductors; solar cells; technological forecasting

Other keywords: rear passivation layer; bifacial PERC applications; industrial PERC manufacturing process steps; AlO-SiN; Al; Al screen printing; local Al rear contact formation; AlO_x/SiN_y layer stack; laser ablation; historic development; lab-type PERC solar cell concept; future development; passivated emitter rear cell; firing; industrial crystalline silicon solar cells; surface passivation; Si

Subjects: Optoelectronics manufacturing; Surface treatment and coating techniques; Pulsed laser deposition; Pulsed laser deposition; Biographical, historical, and personal notes; Semiconductor industry; Surface treatment (semiconductor technology); Photoelectric conversion; solar cells and arrays; Reviews and tutorial papers; resource letters; Surface treatment and degradation in semiconductor technology; Solar cells and arrays