Microwave PE CVD reactor and process for industrial high throughput fabrication of aluminum oxide layers for solar cell applications
This book chapter gives an overview of industrial microwave PE CVD reactors starting at details of the used linear plasma sources and showing then, that a system of modular equipment can be constructed, covering a wide range of wafer throughput and customized backside passivation layer systems.
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Microwave PE CVD reactor and process for industrial high throughput fabrication of aluminum oxide layers for solar cell applications, Page 1 of 2
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