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Thin-film deposition: chemical techniques

Thin-film deposition: chemical techniques

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In this paper, the controlled synthesis of materials in the form of thin films is a fundamental step in many applications, including optical integrated circuits was discussed.

Chapter Contents:

  • 8.1 Introduction
  • 8.2 Sol–gel
  • 8.3 Flame hydrolysis deposition
  • 8.4 Chemical vapour deposition
  • 8.5 Atomic layer deposition
  • 8.6 Other techniques
  • 8.7 Summary
  • References

Inspec keywords: integrated optics; optical films; thin film devices; sol-gel processing

Other keywords: chemical techniques; optical integrated circuits; thin film deposition

Subjects: Optical coatings; Deposition from liquid phases; Optical materials; Integrated optics; Optical coatings and filters; Deposition from liquid phases (melts and solutions); Thin film circuits; Integrated optics

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