Silicon nitride integrated optics
Silicon nitride has emerged as a highly versatile integrated optics material. Its ultra-low losses and mature processing methods provide advantages for passive, active and non-linear optical devices and microsystems operating in the visible, near-infrared (NIR) and mid-infrared (MIR) wavelength ranges. This chapter reviews progress in silicon nitride waveguide technology, devices and photonic integrated circuits (PICs) and recent efforts to build novel materials and devices onto silicon nitride platforms.
Preview this chapter:
Silicon nitride integrated optics, Page 1 of 2
< Previous page Next page > /docserver/preview/fulltext/books/cs/pbcs077f/PBCS077F_ch11-1.gif /docserver/preview/fulltext/books/cs/pbcs077f/PBCS077F_ch11-2.gif