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Silicon nitride integrated optics

Silicon nitride integrated optics

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Silicon nitride has emerged as a highly versatile integrated optics material. Its ultra-low losses and mature processing methods provide advantages for passive, active and non-linear optical devices and microsystems operating in the visible, near-infrared (NIR) and mid-infrared (MIR) wavelength ranges. This chapter reviews progress in silicon nitride waveguide technology, devices and photonic integrated circuits (PICs) and recent efforts to build novel materials and devices onto silicon nitride platforms.

Chapter Contents:

  • 11.1 Introduction
  • 11.2 Silicon nitride waveguide technology
  • 11.2.1 Silicon nitride thin films
  • 11.2.2 Silicon nitride optical waveguides
  • 11.2.3 Photonic integration platforms
  • 11.3 Silicon nitride integrated optical devices
  • 11.3.1 Passive integrated optical devices
  • 11.3.2 Silicon nitride devices for sensing
  • 11.3.3 Non-linear optical devices
  • 11.3.4 Active devices: switches, modulators and photodetectors
  • 11.3.5 Amplifiers and lasers
  • 11.4 Photonic integrated circuits and applications
  • 11.5 Conclusion
  • References

Inspec keywords: silicon compounds; optical waveguides; integrated optics

Other keywords: mature processing method; ultralow losses; photonic integrated circuits; silicon nitride integrated optics; nonlinear optical devices; microsystems; mid-infrared wavelength range; integrated optics material; silicon nitride devices; SiN; visible wavelength range; near-infrared wavelength range; silicon nitride waveguide technology

Subjects: Optical waveguides; Optical waveguides and couplers; Integrated optics; Integrated optics

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